CONTROL OF RF SPUTTERED FILM PROPERTIES THROUGH SUBSTRATE TUNING

被引：78

作者：

LOGAN, JS

机构：

来源：

IBM JOURNAL OF RESEARCH AND DEVELOPMENT | 1970年 / 14卷 / 02期

关键词：

D O I：

10.1147/rd.142.0172

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

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页码：172 / &

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