LUMINESCENCE SPECTROSCOPY OF DRY-ETCHED SINGLE DOTS AND WIRES

被引:5
作者
HUBNER, B [1 ]
JACOBS, B [1 ]
GREUS, C [1 ]
ZENGERLE, R [1 ]
FORCHEL, A [1 ]
机构
[1] DEUTSCH BUNDESPOST TELEKOM,RES INST,D-64295 DARMSTADT,GERMANY
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期
关键词
D O I
10.1116/1.587634
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:3658 / 3662
页数:5
相关论文
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