共 11 条
- [4] KAWAZU A, 1980, P IVC 8 ICSS 4 ECOSS, V2, P1015
- [5] KAWAZU A, 1980, JAPAN J APPL PHYS, V20, P553
- [6] Kern R., 1979, CURRENT TOPICS MAT S, V3, P135
- [8] OYAMA T, 1980, P IVC 8 ICSS 4 ECOSS, V2, P955
- [9] Redhead P. A., 1962, VACUUM, V12, P203, DOI DOI 10.1016/0042-207X(62)90978-8