HIGH-RATE THICK-FILM GROWTH

被引：1902

作者：

THORNTON, JA ^{[1
]}

机构：

[1] TELIC CORP, SANTA MONICA, CA 90404 USA

来源：

ANNUAL REVIEW OF MATERIALS SCIENCE | 1977年 / 7卷

关键词：

D O I：

10.1146/annurev.ms.07.080177.001323

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：239 / 260

页数：22

共 127 条

[1] STRUCTURE AND PROPERTY RELATIONSHIPS OF NI-20CR PRODUCED BY HIGH-RATE PHYSICAL VAPOR-DEPOSITION
AGARWAL, N
KANE, N
BUNSHAH, RF
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (02): : 619 - 623
[2] BARBEE TW, IN PRESS
[3] BAUER E, 1964, SINGLE CRYSTAL FILMS, P43
[4] BAUER E, 1962, 9 T VAC S AM VAC SOC, P35
[5] LOW-PRESSURE GAS SCATTERING OF ELECTRON-BEAM-EVAPORATED MCRALY ALLOYS
BEALE, HA
GROSSKLAUS, W
[J]. THIN SOLID FILMS, 1977, 40 (JAN) : 281 - 289
[6] BEALE HA, 1974, 4 P INT C VAC MET IR, P238
[7] EFFECT OF ION-BOMBARDMENT DURING DEPOSITION ON THICK METAL AND CERAMIC DEPOSITS
BLAND, RD
KOMINIAK, GJ
MATTOX, DM
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (04): : 671 - 674
[8] BOCKRIS JOM, 1964, MOD ASPECT ELECTROC, P224
[9] SOME EFFECTS OF STRUCTURE AND COMPOSITION ON PROPERTIES OF ELECTRON-BEAM VAPOR-DEPOSITED COATINGS FOR GAS-TURBINE SUPERALLOYS
BOONE, DH
STRANGMAN, TE
WILSON, LW
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (04): : 641 - 646
[10] BROPHY JH, 1964, STRUCTURE PROPERTIES, V2, P82