AL3TI FORMATION BY DIFFUSION OF ALUMINUM THROUGH TITANIUM

被引：30

作者：

THUILLARD, M

TRAN, LT

NICOLET, MA

机构：

来源：

THIN SOLID FILMS | 1988年 / 166卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(88)90362-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：21 / 27

页数：7

共 13 条

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