THERMODYNAMIC AND EXPERIMENTAL-STUDY OF HIGH-PURITY ALUMINUM NITRIDE FORMATION FROM ALUMINUM-CHLORIDE BY CHEMICAL VAPOR-DEPOSITION

被引：53

作者：

NICKEL, KG

RIEDEL, R

PETZOW, G

机构：

来源：

关键词：

D O I：

10.1111/j.1151-2916.1989.tb05982.x

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1804 / 1810

页数：7

共 15 条

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