GROWTH CHARACTERISTICS OF A1N FILMS PYROLYTICALLY DEPOSITED ON SI

被引：51

作者：

NOREIKA, AJ

ING, DW

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1968年 / 39卷 / 12期

关键词：

D O I：

10.1063/1.1656017

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5578 / &

共 12 条

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