DESIGN OF A VARIABLE-APERTURE PROJECTION AND SCANNING SYSTEM FOR ELECTRON-BEAM

[1] GOTO E, 1977, OPTIK, V48, P255

[2] DESIGN AND OPTIMIZATION OF MAGNETIC LENSES AND DEFLECTION SYSTEMS FOR ELECTRON-BEAMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1146 - 1150

[3] Ohiwa H, 1971, T I ELECTRON COMMUN, V54-B, P730

[4] NEW IMAGING AND DEFLECTION CONCEPT FOR PROBE-FORMING MICROFABRICATION SYSTEMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1170 - 1173

[5] SOMA T, 1977, OPTIK, V49, P255

[6] SOMA T, 1973, J INFORM P SOC JAPAN, V14, P218

[7] Yourke H. S., 1976, International Electron Devices Meeting. (Technical digest), P431

[1] GOTO E, 1977, OPTIK, V48, P255

[2] DESIGN AND OPTIMIZATION OF MAGNETIC LENSES AND DEFLECTION SYSTEMS FOR ELECTRON-BEAMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1146 - 1150

[3] Ohiwa H, 1971, T I ELECTRON COMMUN, V54-B, P730

[4] NEW IMAGING AND DEFLECTION CONCEPT FOR PROBE-FORMING MICROFABRICATION SYSTEMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1170 - 1173

[5] SOMA T, 1977, OPTIK, V49, P255

[6] SOMA T, 1973, J INFORM P SOC JAPAN, V14, P218

[7] Yourke H. S., 1976, International Electron Devices Meeting. (Technical digest), P431