A DIFFUSION MARKER IN AU-SN THIN-FILMS

被引：31

作者：

GREGERSEN, D

BUENE, L

FINSTAD, T

LONSJO, O

OLSEN, T

机构：

来源：

THIN SOLID FILMS | 1981年 / 78卷 / 01期

关键词：

D O I：

10.1016/0040-6090(81)90420-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：95 / 102

页数：8

共 15 条

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TAFTO, J .

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[2] ROOM-TEMPERATURE INTERDIFFUSION IN EVAPORATED AU-SN FILMS [J].

BUENE, L ;

JACOBSEN, ST .

PHYSICA SCRIPTA, 1978, 18 (06) :397-399

[3] CHARACTERIZATION OF EVAPORATED GOLD-TIN FILMS [J].

BUENE, L .

THIN SOLID FILMS, 1977, 43 (03) :285-294

[4] INTERDIFFUSION AND PHASE FORMATION AT ROOM-TEMPERATURE IN EVAPORATED GOLD-TIN FILMS [J].

BUENE, L .

THIN SOLID FILMS, 1977, 47 (02) :159-166

[5] A STUDY OF EVAPORATED GOLD-TIN FILMS USING TRANSMISSION ELECTRON-MICROSCOPY .2. [J].

BUENE, L ;

FALKENBERGARELL, H ;

GJONNES, J ;

TAFTO, J .

THIN SOLID FILMS, 1980, 67 (01) :95-102

[6]

BUENE L, 1977, 7701 U OSL I PHYS RE

[7] IMPLANTED NOBLE-GAS ATOMS AS DIFFUSION MARKERS IN SILICIDE FORMATION [J].

CHU, WK ;

LAU, SS ;

MAYER, JW ;

MULLER, H .

THIN SOLID FILMS, 1975, 25 (02) :393-402

[8]

Chu WK., 1978, BACKSCATTERING SPECT

[9]

DEARNALEY G., 1973, ION IMPLANTATION

[10]

Hertel B, 1974, APPLICATIONS ION BEA, P507

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