SECONDARY-ELECTRON EMISSION-SPECTROSCOPY - A SENSITIVE AND NOVEL METHOD FOR THE CHARACTERIZATION OF THE NEAR-SURFACE REGION OF DIAMOND AND DIAMOND FILMS

被引：14

作者：

HOFFMAN, A

PRAWER, S

FOLMAN, M

机构：

[1] VICTORIA UNIV TECHNOL RMIT,CTR MICROELECTR & MAT TECHNOL,MELBOURNE,VIC 3000,AUSTRALIA

[2] TECHNION ISRAEL INST TECHNOL,DEPT CHEM,IL-32000 HAIFA,ISRAEL

来源：

APPLIED PHYSICS LETTERS | 1991年 / 58卷 / 04期

关键词：

D O I：

10.1063/1.104634

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Secondary electron emission (SEE) spectroscopy has been employed in the characterization of different carbon allotropes and distinctive signatures were observed for diamond, graphite, and amorphous carbon. Via an examination of the SEE spectrum of Ar+ (1 keV) irradiated diamond surfaces, this spectroscopy is shown to be very sensitive to crystalline perfection. It is also shown that SEE spectroscopy can be used as a very effective and sensitive tool for the characterization of the near-surface region of diamond thin films.

引用

页码：361 / 363

页数：3

共 16 条

[1] INSITU CHARACTERIZATION OF DIAMOND NUCLEATION AND GROWTH
BELTON, DN
HARRIS, SJ
SCHMIEG, SJ
WEINER, AM
PERRY, TA
[J]. APPLIED PHYSICS LETTERS, 1989, 54 (05) : 416 - 418
[2] LATTICE ORIENTATION OF DEFECTS IN ION-IMPLANTED DIAMOND
BRAUNSTEIN, G
KALISH, R
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY): : 387 - 393
[3] RADIATION-DAMAGE AND ANNEALING IN SB IMPLANTED DIAMOND
BRAUNSTEIN, G
TALMI, A
KALISH, R
BERNSTEIN, T
BESERMAN, R
[J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 48 (1-4): : 139 - 144
[4] ANGLE-RESOLVED SECONDARY-ELECTRON INVESTIGATION OF GRAPHITE - A BAND MAPPING
CAPUTI, LS
CHIARELLO, G
COLAVITA, E
SANTANIELLO, A
PAPAGNO, L
[J]. SURFACE SCIENCE, 1985, 152 (APR) : 278 - 283
[5] EXPERIMENTAL BULK ENERGY-BANDS FOR DIAMOND USING HV-DEPENDENT PHOTOEMISSION
HIMPSEL, FJ
VANDERVEEN, JF
EASTMAN, DE
[J]. PHYSICAL REVIEW B, 1980, 22 (04): : 1967 - 1971
[6] HIGH-ENERGY ANGLE-RESOLVED SECONDARY-ELECTRON EMISSION-SPECTROSCOPY OF HIGHLY ORIENTED PYROLYTIC-GRAPHITE
HOFFMAN, A
NYBERG, GL
PRAWER, S
[J]. JOURNAL OF PHYSICS-CONDENSED MATTER, 1990, 2 (40) : 8099 - 8106
[7] EFFECT OF LOW-ENERGY ARGON ION IRRADIATION ON THE SECONDARY-ELECTRON EMISSION-SPECTRUM OF HIGHLY ORIENTED PYROLYTIC-GRAPHITE
HOFFMAN, A
PATERSON, PJK
PRAWER, S
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 51 (03) : 226 - 231
[8] HOFFMAN A, 1990, 2ND INT C NEW DIAM S
[9] HOFFMAN A, IN PRESS PHYS REV B
[10] ANGLE-RESOLVED PHOTOEMISSION AND SECONDARY-ELECTRON EMISSION FROM SINGLE-CRYSTAL GRAPHITE
LAW, AR
BARRY, JJ
HUGHES, HP
[J]. PHYSICAL REVIEW B, 1983, 28 (09): : 5332 - 5335

← 1 2 →