SECONDARY-ELECTRON EMISSION-SPECTROSCOPY - A SENSITIVE AND NOVEL METHOD FOR THE CHARACTERIZATION OF THE NEAR-SURFACE REGION OF DIAMOND AND DIAMOND FILMS

被引:14
作者
HOFFMAN, A
PRAWER, S
FOLMAN, M
机构
[1] VICTORIA UNIV TECHNOL RMIT,CTR MICROELECTR & MAT TECHNOL,MELBOURNE,VIC 3000,AUSTRALIA
[2] TECHNION ISRAEL INST TECHNOL,DEPT CHEM,IL-32000 HAIFA,ISRAEL
关键词
D O I
10.1063/1.104634
中图分类号
O59 [应用物理学];
学科分类号
摘要
Secondary electron emission (SEE) spectroscopy has been employed in the characterization of different carbon allotropes and distinctive signatures were observed for diamond, graphite, and amorphous carbon. Via an examination of the SEE spectrum of Ar+ (1 keV) irradiated diamond surfaces, this spectroscopy is shown to be very sensitive to crystalline perfection. It is also shown that SEE spectroscopy can be used as a very effective and sensitive tool for the characterization of the near-surface region of diamond thin films.
引用
收藏
页码:361 / 363
页数:3
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