VARIABLE SPOT-SHAPED E-BEAM LITHOGRAPHIC TOOL

[1] Davis D. E., 1976, International Electron Devices Meeting. (Technical digest), P440

[2] AUTOMATIC STABILIZATION OF AN ELECTRON-PROBE FORMING SYSTEM [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1174 - 1176

[3] ENGELKE H, 1976, IEDM WASHINGTON, P437

[4] Mauer J. L., 1976, International Electron Devices Meeting. (Technical digest), P434

[5] Moore R. D., 1977, International Conference on Microlithography, P153

[6] NEW IMAGING AND DEFLECTION CONCEPT FOR PROBE-FORMING MICROFABRICATION SYSTEMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1170 - 1173

[7] VARIABLE SPOT SHAPING FOR ELECTRON-BEAM LITHOGRAPHY [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (03): : 887 - 890

[8] WEBER EV, 1976, INT ELECTRON DEVICES, P431

[9] CONTROLLED-ENERGY MICROPOSITIONING SYSTEM FOR HIGH-VACUUM APPLICATIONS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1251 - 1251

[1] Davis D. E., 1976, International Electron Devices Meeting. (Technical digest), P440

[2] AUTOMATIC STABILIZATION OF AN ELECTRON-PROBE FORMING SYSTEM [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1174 - 1176

[3] ENGELKE H, 1976, IEDM WASHINGTON, P437

[4] Mauer J. L., 1976, International Electron Devices Meeting. (Technical digest), P434

[5] Moore R. D., 1977, International Conference on Microlithography, P153

[6] NEW IMAGING AND DEFLECTION CONCEPT FOR PROBE-FORMING MICROFABRICATION SYSTEMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1170 - 1173

[7] VARIABLE SPOT SHAPING FOR ELECTRON-BEAM LITHOGRAPHY [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (03): : 887 - 890

[8] WEBER EV, 1976, INT ELECTRON DEVICES, P431

[9] CONTROLLED-ENERGY MICROPOSITIONING SYSTEM FOR HIGH-VACUUM APPLICATIONS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1251 - 1251