INVESTIGATION OF COMPOSITION OF SPUTTERED SILICONE NITRIDE FILMS BY NUCLEAR MICROANALYSIS

被引：16

作者：

CROSET, M

RIGO, S

AMSEL, G

机构：

来源：

APPLIED PHYSICS LETTERS | 1971年 / 19卷 / 02期

关键词：

D O I：

10.1063/1.1653811

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：33 / &

共 13 条

[1] 7ICROANALYSIS BY DIRECT OBSERVATION OF NUCLEAR REACTIONS USING A 2 MEV VAN-DE-GRAAFF [J].

AMSEL, G ;

NADAI, JP ;

DARTEMAR.E ;

DAVID, D ;

GIRARD, E ;

MOULIN, J .

NUCLEAR INSTRUMENTS & METHODS, 1971, 92 (04) :481-&

[2] MICROANALYSIS OF STABLE ISOTOPES OF OXYGEN BY MEANS OF NUCLEAR REACTIONS [J].

AMSEL, G ;

SAMUEL, D .

ANALYTICAL CHEMISTRY, 1967, 39 (14) :1689-&

[3] MICROANALYSIS OF NITROGEN BY MEANS OF DIRECT OBSERVATION OF NUCLEAR REACTIONS . APPLICATIONS [J].

AMSEL, G ;

DAVID, D .

REVUE DE PHYSIQUE APPLIQUEE, 1969, 4 (03) :383-&

[4]

AMSEL G, UNPUBLISHED

[5]

AMSEL G, 1969, P INT C MIS STRUCTUR, P243

[6]

EDGE RD, 1967, BNL50083, P167

[7] ANALYSIS OF SILICON NITRIDE LAYERS ON SILICON BY BACKSCATTERING AND CHANNELING EFFECT MEASUREMENTS [J].

GYULAI, J ;

MEYER, O ;

MAYER, JW ;

RODRIGUE.V .

APPLIED PHYSICS LETTERS, 1970, 16 (06) :232-&

[8] SILICON NITRIDE FILMS BY REACTIVE SPUTTERING [J].

HU, SM ;

GREGOR, LV .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1967, 114 (08) :826-+

[9] PROPERTIES OF AMORPHOUS SILICON NITRIDE FILMS [J].

HU, SM .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1966, 113 (07) :693-+

[10] ANALYSIS OF AMORPHOUS LAYERS ON SILICON BY BACKSCATTERING AND CHANNELING EFFECT MEASUREMENTS [J].

MEYER, O ;

GYULAI, J ;

MAYER, JW .

SURFACE SCIENCE, 1970, 22 (02) :263-&

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