ANNEALING AND ELECTRICAL-PROPERTIES OF HG1-XCDXTE GROWN BY OMVPE

被引:8
作者
PARAT, KK
TASKAR, NR
BHAT, IB
GHANDHI, SK
机构
[1] Electrical, Computer and Systems Engineering Department, Rensselaer Polythecnic Institute, Troy
关键词
D O I
10.1016/0022-0248(90)90024-F
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The annealing behavior of Hg(1-x)Cd(x)Te layers, grown by the conventional organometallic vapor phase epitaxy (OMVPE), is reported. Some of the as-grown layers, which are p-type with a concentration around 4 x 10(16) cm-3 of Group II vacancies, become light p-type with carrier concentrations around 1 x 10(15) cm-3 after Hg saturated annealings at temperatures in the range of 200-230-degrees-C. These conditions are typically expected to result in complete annealing and n-type conversion of the layer. These layers can be converted to n-type with a carrier concentration of approximately 5 x 10(14) cm-3 by a higher temperature anneal at 290-degrees-C, followed by a low temperature anneal at 220-degrees-C. Hall effect measurements were made under variable temperature as well as variable magnetic field conditions. Bulk carrier concentrations and mobilities were evaluated by considering the effect of the surface inversion/accumulation layer on the Hall data. It is proposed that p-type conduction in the partially annealed layers is due to the persistence of Group II vacancies in the Hg1-xCd(x)Te layers, which are not completely annihilated during the low temperature anneal. Conversion to n-type is probably due to residual donor impurities in the as grown Hg1-xCd(x)Te layer.
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页码:513 / 523
页数:11
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