OPTICAL-PROPERTIES OF ELECTRON-BEAM EVAPORATED TIO2 FILMS DEPOSITED IN AN IONIZED OXYGEN MEDIUM

被引：68

作者：

RAO, KN

MOHAN, S

机构：

[1] Instrumentation and Services Unit, Indian Institute of Science, Bangalore-

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1990年 / 8卷 / 04期

关键词：

D O I：

10.1116/1.576575

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Optical absorption in TiO2films depends upon starting material and deposition conditions. The influence of the combined effect of substrate temperature and ionized oxygen on the optical properties of TiO2films deposited by reactive electron beam evaporation of TiO is presented. The ionized oxygen medium reduced the absorption in films considerably. The substrate temperature has only marginal influence on the extinction coefficient of these films. The influence of film thickness on the optical properties of TiO2films is also studied. The variation in optical properties of TiO2films has been explained on the basis of enhanced reactivity of oxygen and the decrease of the condensation coefficient of reacting species at elevated substrate temperature. © 1990, American Vacuum Society. All rights reserved.

引用

页码：3260 / 3264

页数：5

共 25 条

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