共 15 条
[1]
BLEVIN HA, 1966, AUST J PHYS, V19, P501
[3]
Chen F F, 1992, INT C PLASM PHYS, VIII, P1701
[6]
EXPERIMENTAL MODELING OF INDUCTIVE DISCHARGES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1993, 11 (04)
:1165-1171