CHARACTERIZATION OF POLYMERIC THIN-FILMS BY LOW-DAMAGE SECONDARY ION MASS-SPECTROMETRY

被引：33

作者：

CAMPANA, JE

DECORPO, JJ

COLTON, RJ

机构：

来源：

APPLICATIONS OF SURFACE SCIENCE | 1981年 / 8卷 / 03期

关键词：

D O I：

10.1016/0378-5963(81)90127-6

中图分类号：

学科分类号：

摘要：

引用

页码：337 / 342

页数：6

共 22 条

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