ION-BEAM TEXTURING OF SURFACES

被引:59
作者
KAUFMAN, HR
ROBINSON, RS
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 02期
关键词
Compilation and indexing terms; Copyright 2025 Elsevier Inc;
D O I
10.1116/1.569899
中图分类号
O59 [应用物理学];
学科分类号
摘要
Textured surfaces, typically with conical structures, have been produced previously by simultaneously etching a surface and seeding that surface with another material. A theory based on surface diffusion predicts a variation in cone spacing with surface temperature, as well as a critical temperature below which cones will not form. Substantial agreement with theory has been found for several combinations of seed and surface materials, including one with a high sputter yield seed on a low sputter yield surface (gold on aluminum). Coning with this last combination was predicted by the theory for a sufficiently mobile seed material. The existence of a minimum temperature for the formation of cones should also be important to those interested in ion-beam machining smooth surfaces. Elements contained in the environmental contaminants or in the sputtered alloys or compounds may serve as seed material.
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页码:175 / 178
页数:4
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