MICROSTRUCTURE FABRICATION IN ELECTRONIC DEVICES

被引：6

作者：

DEAL, BE

CROSSLEY, PA

机构：

来源：

ANNUAL REVIEW OF MATERIALS SCIENCE | 1981年 / 11卷

关键词：

D O I：

10.1146/annurev.ms.11.080181.001541

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：321 / 351

页数：31

共 70 条

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