DETERMINING HYBRIDIZATION DIFFERENCES FOR AMORPHOUS-CARBON FROM THE XPS C-1S ENVELOPE

Two kinds of amorphous carbon (a-C) thin film samples were synthesized, one by magnetron sputtering, the other by filtered cathodic are deposition. X-ray photoelectron spectroscopy (XPS) showed that the C1s envelope for each sample was primarily a convolution of three peaks which are assignable to sp(2) hybridized carbon, sp(3) hybridized carbon (shifted from the sp(2) peak by similar to 1 eV) and an sp(2) satellite peak, possibly due to pi-pi* transition. The satellite typically comprised just under 14% of the total sp(2) signal and was shifted from the main sp(2) peak by similar to 2 eV. The relative amounts of each bonding type were determined by comparing the integrated areas of the sp(2) and sp(3) peaks. Auger electron spectroscopy (AES) was also performed on these samples, along with highly ordered pyrolytic graphite (100% sp(2)) and natural diamond (100% sp(3)) for comparison purposes. The binding energy width D between the highest maximum and lowest minimum values of the first derivative C (KLL) spectra were obtained and a linear relationship between D and the amount of sp(3) bonding assumed. When comparing sp(3) values obtained by AES and deconvoluted XPS spectra an error range within +/-1.5% was found, making XPS a satisfactory method for obtaining hybridization information. It was noted that Ar+ ion bombardment has a substantial effect on the surface sp(2)/sp(3) ratio, as observed by XPS. These results are related to other studies of ion bombardment of graphite and diamond.