COMPARISON AMONG XAES, PELS AND XPS TECHNIQUES FOR EVALUATION OF SP2 PERCENTAGE IN A-C-H

被引：137

作者：

LASCOVICH, JC

SCAGLIONE, S

机构：

[1] ENEA,CRE CASACCIA,THIN FILM LAB,VIA ANGUILLARESE 301,I-00060 ROME,ITALY

[2] ENEA,CRE CASACCIA,AREA INNOVAZ,I-00060 ROME,ITALY

来源：

APPLIED SURFACE SCIENCE | 1994年 / 78卷 / 01期

关键词：

D O I：

10.1016/0169-4332(94)90026-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The ratio R of Sp3 to Sp2 in hydrogenated amorphous carbon (a-C:H) has been evaluated by X-ray Auger electron spectroscopy (XAES), photoelectron energy loss spectroscopy (PELS) and X-ray photoelectron spectroscopy (XPS). Hydrogenated amorphous carbon samples have been deposited by dual ion beam sputtering technique (DIBS). Percentages of Sp 2 sites are in the range of 45% to 70% for all analyzed samples. Values measured by XAES are about 10% greater than values measured by PELS and the XPS evaluation appears in agreement with them. Besides, R values seem to be influenced not only by hydrogen contents but even by parameters of deposition (i.e. energy of hydrogen ion beam and growth rate).

引用

页码：17 / 23

页数：7

共 34 条

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