STRUCTURE AND PROPERTIES OF DIAMONDLIKE CARBON COATINGS DEPOSITED IN RF PLASMA FROM BENZENE AND MONOSUBSTITUTED BENZENES

被引：13

作者：

JOSHI, A

GANGAL, SA

KULKARNI, SK

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 12期

关键词：

D O I：

10.1063/1.342021

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：6668 / 6672

页数：5

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