THE NATURE AND FORMATION MECHANISM OF ANOMALOUS DEFECTS IN DISLOCATION FREE FZ-SILICON CRYSTALS CAUSED BY HYDROGEN DOPING

被引:9
作者
WOLF, E
机构
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1982年 / 70卷 / 01期
关键词
D O I
10.1002/pssa.2210700155
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:K59 / K61
页数:3
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