FE-C FILM FORMATION BY DUAL ION-BEAM SPUTTERING

被引：9

作者：

KOBAYASHI, T

OOTOMO, S

KUMASAKA, N

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 12期

关键词：

D O I：

10.1063/1.338241

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：5480 / 5483

页数：4

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