PRIMARY AR+ ION-BOMBARDMENT EFFECT ON NI-FE FILM COMPOSITION FORMED BY ION-BEAM SPUTTERING

被引：15

作者：

NAGAI, Y

NISHIMURA, C

TOSHIMA, T

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1985年 / 3卷 / 06期

关键词：

D O I：

10.1116/1.573269

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2147 / 2151

页数：5

共 9 条

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[6] SPUTTER ETCHING STUDIES OF FE-NI AND FE-PD FILMS
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[7] PREFERRED SPUTTERING ON BINARY ALLOY SURFACES OF THE AL-PD-SI SYSTEM
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02): : 772 - 773
[8] POBREW D, 1982, THIN SOLID FILMS, V92, P41
[9] THOMPSON GR, 1978, SOLID STATE TECHNOL, V21, P73