EPITAXIAL-GROWTH QUALITY OPTIMIZATION BY SUPERCOMPUTER

被引：37

作者：

CLARKE, S

VVEDENSKY, DD

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 05期

关键词：

D O I：

10.1063/1.98434

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：340 / 342

页数：3

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共 7 条

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