TRANSMISSION ELLIPSOMETRY ON TRANSPARENT UNBACKED OR EMBEDDED THIN-FILMS WITH APPLICATION TO SOAP FILMS IN AIR

被引:13
作者
AZZAM, RMA
机构
[1] University of New Orleans, Department of Electrical Engineering, New Orleans, LA
来源
APPLIED OPTICS | 1991年 / 30卷 / 19期
关键词
D O I
10.1364/AO.30.002801
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The ratio rho-t = T(p)/T(s) of the complex amplitude transmission coefficients for the p and s polarizations of a transparent unbacked or embedded thin film is examined as a function of the film thickness-to-wavelength ratio d/lambda and the angle of incidence phi for a given film refractive index N. The maximum value of the differential transmission phase shift (or retardance), DELTA-t = arg-rho-t, is determined, for given N and phi, by a simple geometrical construction that involves the iso-phi circle locus of rho-t in the complex plane. The upper bound on this maximum equals arctan{[N - (1/N)]2} and is attained in the limit of grazing incidence. An analytical noniterative method is developed for determining N and d of the film from rho-t measured by transmission ellipsometry (TELL) at phi = 45-degrees. An explicit expression for DELTA-t of an ultrathin film, d/lambda << 1, is derived in product form that shows the dependence of DELTA-t on N, phi, and d/lambda separately. The angular dependence is given by an obliquity factor, f(o)(phi) = 2 1/2 sin-phi tan-phi, which is verified experimentally by TELL measurements on a stable planar soap film in air at lambda = 633 nm. The singularity of f(o) at phi = 90-degrees is resolved; DELTA-t is shown to have a maximum just short of grazing incidence and drops to 0 at phi = 90-degrees. Because N and d/lambda are inseparable for an ultrathin film, N is determined by a Brewster angle measurement and d/lambda is subsequently obtained from DELTA-t. Finally, the ellipsometric function in reflection rho-r is related to that in transmission rho-t.
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页码:2801 / 2806
页数:6
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