BIRDS BEAK CONFIGURATION AND ELIMINATION OF GATE OXIDE THINNING PRODUCED DURING SELECTIVE OXIDATION

被引：29

作者：

SHANKOFF, TA

SHENG, TT

HASZKO, SE

MARCUS, RB

SMITH, TE

机构：

来源：

关键词：

D O I：

10.1149/1.2129621

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：216 / 222

页数：7

共 7 条

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YU, HN ;

MANISCALCO, V .

[2]

CLEMENS JT, UNPUBLISHED

KOOI, E ;

VANLIEROP, JG ;

APPELS, JA .

MURARKA, SP ;

CHANG, CC ;

ADAMS, AC .

[5] GATE OXIDE THINNING AT ISOLATION OXIDE WALL [J].

SHENG, TT ;

MARCUS, RB .

[6]

SHENG TT, 1976, IEEE T ELECTRON DEV, V23, P531, DOI 10.1109/T-ED.1976.18447

[7]

SHENG TT, UNPUBLISHED