EFFECT OF HYDROGEN ON THE GROWTH-KINETICS OF PD2SI

被引：2

作者：

BARBARINO, AE

COSTANZO, E

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(81)90501-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：35 / 38

页数：4

共 9 条

[1]

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PRUDENZIATI, M ;

WADLIN, WH ;

EVANS, CA .

[3] AMBIENT EFFECTS ON THE DIFFUSION OF CR AND SI IN THIN PT FILMS [J].

CHANG, CA ;

CHU, WK .

[4]

CRIDER B, 1979, THESIS PRINCETON U N

FERTIG, DJ ;

ROBINSON, GY .

[6]

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[7]

OTTAVIANI G, 1979, J VAC SCI TECHNOL, V16, P112

[8]

Poate J M, 1978, THIN FILMS INTERDIFF

[9]

Rhoderick E.H., 1978, METAL SEMICONDUCTORS