HIGH-RESOLUTION SAMPLING SEM FOR QUANTITATIVE INVESTIGATIONS OF SEMICONDUCTOR-DEVICES AND INTEGRATED-CIRCUITS

被引：11

作者：

GOPINATH, A

GOPINATHAN, KG

机构：

[1] University College of North Wales, School of Electronic Engineering Science, Bangor, Gwynedd, Wales

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1978年 / 25卷 / 04期

关键词：

D O I：

10.1109/T-ED.1978.19103

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A scanning microscope has been interfaced with sampling circuitry to record high-speed voltage waveforms at internal points in devices. The system is capable of resolving rise times of 100 ps and voltage steps with an uncertainty of less than 10 mV. Results demonstrate the operation of the 4-GHz sampling SEM. Copyright © 1978 by The Institute of Electrical and Electronics Engineers, Inc.

引用

页码：431 / 434

页数：4

共 3 条

[1] DEFLECTION BEAM-CHOPPING IN SEM [J].