DOT LITHOGRAPHY FOR ZERO-DIMENSIONAL QUANTUM WELLS USING FOCUSED ION-BEAMS

被引：18

作者：

KUBENA, RL

JOYCE, RJ

WARD, JW

GARVIN, HL

STRATTON, FP

BRAULT, RG

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 01期

关键词：

D O I：

10.1116/1.583997

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：353 / 356

页数：4

共 13 条

[1] ION-BEAM LITHOGRAPHY AT NANOMETER DIMENSIONS [J].

ADESIDA, I ;

KRATSCHMER, E ;

WOLF, ED ;

MURAY, A ;

ISAACSON, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01) :45-49

[2] GAIN AND THE THRESHOLD OF 3-DIMENSIONAL QUANTUM-BOX LASERS [J].

ASADA, M ;

MIYAMOTO, Y ;

SUEMATSU, Y .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1986, 22 (09) :1915-1921

[3]

BRAULT RG, 1985, P SOC PHOTO-OPT INST, V539, P70, DOI 10.1117/12.947817

[4] OPTICALLY DETECTED CARRIER CONFINEMENT TO ONE AND ZERO DIMENSION IN GAAS QUANTUM-WELL WIRES AND BOXES [J].

CIBERT, J ;

PETROFF, PM ;

DOLAN, GJ ;

PEARTON, SJ ;

GOSSARD, AC ;

ENGLISH, JH .

APPLIED PHYSICS LETTERS, 1986, 49 (19) :1275-1277

[5] KINETICS OF IMPLANTATION ENHANCED INTERDIFFUSION OF GA AND AL AT GAAS-GAXAL1-XAS INTERFACES [J].

CIBERT, J ;

PETROFF, PM ;

WERDER, DJ ;

PEARTON, SJ ;

GOSSARD, AC ;

ENGLISH, JH .

APPLIED PHYSICS LETTERS, 1986, 49 (04) :223-225

[6] OPTICAL SPECTROSCOPY OF ULTRASMALL STRUCTURES ETCHED FROM QUANTUM-WELLS [J].

KASH, K ;

SCHERER, A ;

WORLOCK, JM ;

CRAIGHEAD, HG ;

TAMARGO, MC .

APPLIED PHYSICS LETTERS, 1986, 49 (16) :1043-1045

[7] MASKLESS ETCHING OF A NANOMETER STRUCTURE BY FOCUSED ION-BEAMS [J].

KOMURO, M ;

HIROSHIMA, H ;

TANOUE, H ;

KANAYAMA, T .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04) :985-989

[8]

LEVISETTI R, 1985, SCANNING ELECTRON MI, V2, P535

[9] SPATIAL QUANTIZATION IN GAAS-ALGAAS MULTIPLE QUANTUM DOTS [J].

REED, MA ;

BATE, RT ;

BRADSHAW, K ;

DUNCAN, WM ;

FRENSLEY, WR ;

LEE, JW ;

SHIH, HD .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (01) :358-360

[10] FABRICATION OF SMALL LATERALLY PATTERNED MULTIPLE QUANTUM-WELLS [J].

SCHERER, A ;

CRAIGHEAD, HG .

APPLIED PHYSICS LETTERS, 1986, 49 (19) :1284-1286

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