INTERCONNECTION LINES OF PT-INDUCED BY LASER DIRECT WRITING

被引：11

作者：

GARRIDO, C ^{[1
]}

BRAICHOTTE, D ^{[1
]}

VANDENBERGH, H ^{[1
]}

LEON, B ^{[1
]}

PEREZAMOR, M ^{[1
]}

机构：

[1] ECOLE POLYTECH FED LAUSANNE,CHIM TECH LAB,CH-1015 LAUSANNE,SWITZERLAND

来源：

APPLIED SURFACE SCIENCE | 1989年 / 43卷

关键词：

D O I：

10.1016/0169-4332(89)90192-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：68 / 73

页数：6

共 12 条

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ALLEN, SD .

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[2]

BAUERLE D, 1986, CHEM PROCESSING LASE

[3] LASER CHEMICAL VAPOR-DEPOSITION OF GOLD .2. [J].

BAUM, TH ;

JONES, CR .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (05) :1187-1191

[4] LASER PROJECTION PATTERNED ALUMINUM METALLIZATION FOR INTEGRATED-CIRCUIT APPLICATIONS [J].

BLONDER, GE ;

HIGASHI, GS ;

FLEMING, CG .

APPLIED PHYSICS LETTERS, 1987, 50 (12) :766-768

[5] GAS-PHASE VERSUS SURFACE CONTRIBUTIONS TO PHOTOLYTIC LASER CHEMICAL VAPOR-DEPOSITION RATES [J].

BRAICHOTTE, D ;

VANDENBERGH, H .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1988, 45 (04) :337-343

[6]

BRAICHOTTE D, 1985, INT C LASERS

[7]

GARRIDO C, 1989, THESIS U SANTIAGO

[8]

GARRIDO C, 1989, P SPIE, V1022, P81

[9]

GARRIDO C, 1988, 35TH NATL VAC S TOP

[10]

GARRIDO C, IN PRESS

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