A MODEL FOR THE WIDTH DEPENDENCE OF ELECTROMIGRATION LIFETIMES IN ALUMINUM THIN-FILM STRIPES

被引：90

作者：

KINSBRON, E

机构：

来源：

关键词：

D O I：

10.1063/1.91385

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：968 / 970

页数：3

共 8 条

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[4] ELECTROMIGRATION IN THIN ALUMINUM FILMS ON TITANIUM NITRIDE [J].

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[5]

DHeurle F. M., 1973, PHYS THIN FILMS, V7, P257

[6]

KINSBRON E, 1977, THIN SOLID FILMS, V446, P139

[7]

SCOGGAN GA, 13TH P ANN REL PHYS, P151

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