X-RAY-LITHOGRAPHY MASK TECHNOLOGY

[1] BUCKLEY WD, 1980, MAY EL SOC M ST LOUI

[2] HIGH-SPEED REPLICATION OF SUBMICRON FEATURES ON LARGE AREAS BY X-RAY LITHOGRAPHY [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1975, ED22 (07) : 429 - 433

[3] MOVCHAN BA, 1969, PHYS METALS METALLOG, V28, P83

[4] NOWICKI RS, 1978, J VAC SCI TECHNOL, V15, P253

[5] THIN-FILM INTERDIFFUSION .1. AU-PD, PD-AU, TI-PD, TI-AU, TI-PD-AU, AND TI-AU-PD [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (10) : 4275 - 4283

[6] X-RAY LITHOGRAPHY - COMPLEMENTARY TECHNIQUE TO ELECTRON-BEAM LITHOGRAPHY [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (06): : 913 - 917

[7] SYLWESTROWICZ WD, 1979, J MATER SCI, V141, P873

[1] BUCKLEY WD, 1980, MAY EL SOC M ST LOUI

[2] HIGH-SPEED REPLICATION OF SUBMICRON FEATURES ON LARGE AREAS BY X-RAY LITHOGRAPHY [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1975, ED22 (07) : 429 - 433

[3] MOVCHAN BA, 1969, PHYS METALS METALLOG, V28, P83

[4] NOWICKI RS, 1978, J VAC SCI TECHNOL, V15, P253

[5] THIN-FILM INTERDIFFUSION .1. AU-PD, PD-AU, TI-PD, TI-AU, TI-PD-AU, AND TI-AU-PD [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (10) : 4275 - 4283

[6] X-RAY LITHOGRAPHY - COMPLEMENTARY TECHNIQUE TO ELECTRON-BEAM LITHOGRAPHY [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (06): : 913 - 917

[7] SYLWESTROWICZ WD, 1979, J MATER SCI, V141, P873