ION-BEAM-INDUCED REACTIONS IN METAL-SEMICONDUCTOR AND METAL-METAL THIN-FILM STRUCTURES

被引：254

作者：

MAYER, JW ^{[1
]}

TSAUR, BY ^{[1
]}

LAU, SS ^{[1
]}

HUNG, LS ^{[1
]}

机构：

[1] CALTECH,PASADENA,CA 91125

来源：

NUCLEAR INSTRUMENTS & METHODS | 1981年 / 182卷 / APR期

关键词：

D O I：

10.1016/0029-554X(81)90666-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：1 / 13

页数：13

共 34 条

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