FORCE MEASUREMENT WITH A PIEZOELECTRIC CANTILEVER IN A SCANNING FORCE MICROSCOPE

被引：39

作者：

TANSOCK, J

WILLIAMS, CC

机构：

[1] Department of Physics, University of Utah, Salt Lake City

来源：

ULTRAMICROSCOPY | 1992年 / 42卷

关键词：

D O I：

10.1016/0304-3991(92)90467-X

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Detection of surface forces between a tip and sample has been demonstrated with a piezoelectric cantilever in a scanning force microscope (SFM). The use of piezoelectric force sensing is particularly advantageous in semiconductor applications where stray light from conventional optical force-sensing methods can significantly modify the local carrier density. Additionally, the piezoelectric sensors are simple, provide good sensitivity to force, and can be batch fabricated. Our piezoelectric force sensors will be described, the theoretical sensitivity and performance of piezoelectric sensors will be discussed and experimental measurements of sensitivity and imaging results will be presented.

引用

页码：1464 / 1469

页数：6

共 11 条

[1]

BINNIG G, 1986, PHYS REV LETT, V56, P1164

[2]

GUTHNER P, 1989, APPL PHYS B, V48, P89

[3] ATOMIC FORCE MICROSCOPE FORCE MAPPING AND PROFILING ON A SUB 100-A SCALE [J].

MARTIN, Y ;

WILLIAMS, CC ;

WICKRAMASINGHE, HK .

JOURNAL OF APPLIED PHYSICS, 1987, 61 (10) :4723-4729

[4]

MCCLELLAND GM, 1987, REV PROGR QUANTITA B, V6, P1307

[5] NOVEL OPTICAL APPROACH TO ATOMIC FORCE MICROSCOPY [J].

MEYER, G ;

AMER, NM .

APPLIED PHYSICS LETTERS, 1988, 53 (12) :1045-1047

[6]

POHL D, 1987, IBM PATENT OSCILLATI

[7] FORCE MICROSCOPE USING A FIBER-OPTIC DISPLACEMENT SENSOR [J].

RUGAR, D ;

MAMIN, HJ ;

ERLANDSSON, R ;

STERN, JE ;

TERRIS, BD .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1988, 59 (11) :2337-2340

[8] COMPACT SCANNING-FORCE MICROSCOPE USING A LASER DIODE [J].

SARID, D ;

IAMS, D ;

WEISSENBERGER, V ;

BELL, LS .

OPTICS LETTERS, 1988, 13 (12) :1057-1059

[9] TUNNELING ACOUSTIC MICROSCOPE [J].

TAKATA, K ;

HASEGAWA, T ;

HOSAKA, S ;

HOSOKI, S ;

KOMODA, T .

APPLIED PHYSICS LETTERS, 1989, 55 (17) :1718-1720

[10]

TANSOCK J, 1991, THESIS U UTAH

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