PROPERTIES OF AMORPHOUS-CARBON FILMS DEPOSITED BY ION-BEAM METHODS

被引：16

作者：

KERWIN, DB

SPAIN, IL

ROBINSON, RS

DAUDIN, B

DUBUS, M

FONTENILLE, J

机构：

[1] COLORADO STATE UNIV,DEPT PHYS,FT COLLINS,CO 80523

[2] CEN,SERV BASSES TEMPERATURES,F-38041 GRENOBLE,FRANCE

[3] CEN,DEPT RECH FONDAMENTALE,F-38041 GRENOBLE,FRANCE

来源：

THIN SOLID FILMS | 1987年 / 148卷 / 03期

关键词：

D O I：

10.1016/0040-6090(87)90325-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：311 / 321

页数：11

共 27 条

[1]

Angus J. C., 1982, Metastable Materials Formation by Ion Implantation. Proceedings of the Materials Research Society Annual Meeting, P433

[2]

ANGUS JC, 1984, THIN SOLID FILMS, V118, P311, DOI 10.1016/0040-6090(84)90202-5

[3] ION-BEAM SPUTTER-DEPOSITED DIAMOND-LIKE FILMS [J].

BANKS, BA ;

RUTLEDGE, SK .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (03) :807-814

[4] STRUCTURE AND PROPERTIES OF TRANSPARENT AND HARD CARBON-FILMS [J].

BEWILOGUA, K ;

DIETRICH, D ;

PAGEL, L ;

SCHURER, C ;

WEISSMANTEL, C .

SURFACE SCIENCE, 1979, 86 (JUL) :308-313

[5] STRUCTURE, OPTICAL-PROPERTIES AND DECOMPOSITION KINETICS OF SPUTTERED HYDROGENATED CARBON [J].

CRAIG, S ;

HARDING, GL .

THIN SOLID FILMS, 1982, 97 (04) :345-361

[6] USE OF RAMAN-SCATTERING TO INVESTIGATE DISORDER AND CRYSTALLITE FORMATION IN AS-DEPOSITED AND ANNEALED CARBON-FILMS [J].

DILLON, RO ;

WOOLLAM, JA ;

KATKANANT, V .

PHYSICAL REVIEW B, 1984, 29 (06) :3482-3489

[7] BONDING IN HYDROGENATED HARD CARBON STUDIED BY OPTICAL SPECTROSCOPY [J].

DISCHLER, B ;

BUBENZER, A ;

KOIDL, P .

SOLID STATE COMMUNICATIONS, 1983, 48 (02) :105-108

[8] SOME NEW RESULTS ON THE FABRICATION OF AND THE MECHANICAL, ELECTRICAL AND OPTICAL-PROPERTIES OF I-CARBON LAYERS [J].

ENKE, K .

THIN SOLID FILMS, 1981, 80 (1-3) :227-234

[9] BUCKLING INSTABILITY AND ADHESION OF CARBON LAYERS [J].

GILLE, G ;

RAU, B .

THIN SOLID FILMS, 1984, 120 (02) :109-121

[10] TETRAHEDRAL CARBON-FILM BY HYDROGEN GAS REACTIVE RF-SPUTTERING OF GRAPHITE ONTO LOW-TEMPERATURE SUBSTRATE [J].

HIRAKI, A ;

KAWANO, T ;

KAWAKAMI, Y ;

HAYASHI, M .

SOLID STATE COMMUNICATIONS, 1984, 50 (08) :713-716

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