NONLINEAR VISCOELASTIC DILATION OF SIO2-FILMS

被引:26
作者
RAFFERTY, CS
LANDSBERGER, LM
DUTTON, RW
TILLER, WA
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10.1063/1.101440
中图分类号
O59 [应用物理学];
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页码:151 / 152
页数:2
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共 20 条
[1]   PLASTIC-DEFORMATION IN METALLIC GLASSES [J].
ARGON, AS .
ACTA METALLURGICA, 1979, 27 (01) :47-58
[2]  
ARNDT J, 1969, PHYS CHEM GLASSES, V10, P117
[3]   STRESS RELAXATION IN COILED RIBBONS OF FE40NI40P14B6 AND FE29NI49P14B6S2 [J].
AST, DG ;
KRENITSKY, DJ .
JOURNAL OF MATERIALS SCIENCE, 1979, 14 (02) :287-295
[4]  
Bridgman PW, 1925, AM J SCI, V10, P359
[5]   PLASTIC BEHAVIOR OF SILICA GLASS NEAR THE GLASS-TRANSITION [J].
DONNADIEU, P ;
JAOUL, O ;
KLEMAN, M .
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1985, 52 (01) :5-17
[6]   STRESS IN THERMAL SIO2 DURING GROWTH [J].
EERNISSE, FP .
APPLIED PHYSICS LETTERS, 1979, 35 (01) :8-10
[7]   Viscosity, plasticity, and diffusion as examples of absolute reaction rates [J].
Eyring, H .
JOURNAL OF CHEMICAL PHYSICS, 1936, 4 (04) :283-291
[8]   A VISCOUS-FLOW MODEL TO EXPLAIN THE APPEARANCE OF HIGH-DENSITY THERMAL SIO2 AT LOW OXIDATION TEMPERATURES [J].
IRENE, EA ;
TIERNEY, E ;
ANGILELLO, J .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (11) :2594-2597
[9]  
Kennedy J. C., 1964, PHYS CHEM GLASSES-B, V5, P130
[10]   INTRINSIC SIO2 FILM STRESS MEASUREMENTS ON THERMALLY OXIDIZED SI [J].
KOBEDA, E ;
IRENE, EA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01) :15-19