STRESS DETERMINATION IN TEXTURED THIN-FILMS USING X-RAY-DIFFRACTION

被引:121
作者
CLEMENS, BM
BAIN, JA
机构
关键词
D O I
10.1557/S0883769400041658
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
[No abstract available]
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页码:46 / 51
页数:6
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