CONSTRUCTION OF AN INEXPENSIVE DC PLASMA-JET FOR DIAMOND DEPOSITION USING COMMERCIALLY AVAILABLE COMPONENTS

被引：14

作者：

CERIO, FM ^{[1
]}

WEIMER, WA ^{[1
]}

机构：

[1] USN,NAVAL WEAPONS CTR,DIV CHEM,RES DEPT,CHINA LAKE,CA 93555

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 03期

关键词：

D O I：

10.1063/1.1143167

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A de plasma jet reactor system, constructed from commercially available components, is described. Parameters for the chemical vapor deposition of high quality diamond are given. Diamond films were synthesized on Mo, Si, Cu, and stainless-steel substrates and characterized by optical microscopy and Raman spectroscopy.

引用

页码：2065 / 2068

页数：4

共 15 条

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