STRUCTURE AND MICROHARDNESS OF TIN COMPOSITIONAL AND ALLOYED FILMS

被引：68

作者：

ANDRIEVSKI, RA ^{[1
]}

ANISIMOVA, IA ^{[1
]}

ANISIMOV, VP ^{[1
]}

机构：

[1] AS KIRGHIZSTAN,INST PHYS,BISHKEK 720071,USSR

来源：

THIN SOLID FILMS | 1991年 / 205卷 / 02期

关键词：

D O I：

10.1016/0040-6090(91)90299-D

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The compositional and alloyed films of TiN containing aluminium, zirconium, chromium and niobium were investigated by X-ray diffraction, electron microscopy and microhardness measurements. The recrystallization of the films was also studied. A general tendency of the microhardness to increase with decrease in layer thickness was found in TiN-ZrN (AlN, CrN, NbN) systems. The decrease in microhardness in these systems with the increase in annealing temperature was also fixed in experiments besides (Ti, Zr)N films in which at T > 800-degrees-C the microhardness was increased. It is assumed that the spinodal decomposition in the TiN-ZrN system is accompanied by an increase in microhardness.

引用

页码：171 / 175

页数：5

共 13 条

[1]

ANDRIEVSKI RA, 1989, IZV ACAD SCI KIRGHIZ, V2, P32

[2]

Andrievskii R.A., 1989, STRENGTH REFRACTORY, P368

[3]

CHINALIEV OK, 1989, P C WEAR RESISTANT F, V1, P65

[4] PREPARATION AND BEHAVIOR OF WEAR-RESISTANT TIC/TIB2, TIN/TIB2 AND TIC/TIN COATINGS WITH HIGH AMOUNTS OF PHASE BOUNDARIES [J].