FINE LINE ALUMINUM ETCHING IN AIR AND IN SOLUTION USING A TUNABLE DYE-LASER

被引：2

作者：

CONTOLINI, RJ ^{[1
]}

ALSPECTOR, J ^{[1
]}

机构：

[1] BELL COMMUN RES,MORRISTOWN,NJ 07960

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 04期

关键词：

D O I：

10.1063/1.342927

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1759 / 1765

页数：7

共 27 条

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