FAST LASER WRITING OF COPPER AND IRIDIUM LINES FROM THIN SOLID-SURFACE LAYERS OF METALORGANIC COMPOUNDS

被引：34

作者：

HOFFMANN, P

LECOHIER, B

GOLDONI, S

VANDENBERGH, H

机构：

[1] Ecole Polytechnique Federale de, Lausanne, Switzerland

来源：

APPLIED SURFACE SCIENCE | 1989年 / 43卷 / 1-4期

关键词：

17;

D O I：

10.1016/0169-4332(89)90190-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：54 / 60

页数：7

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