RAMAN-STUDY OF AMORPHOUS TO MICROCRYSTALLINE PHASE-TRANSITION IN CW LASER ANNEALED A-SI-H FILMS

被引：77

作者：

MAVI, HS

SHUKLA, AK

ABBI, SC

JAIN, KP

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 11期

关键词：

D O I：

10.1063/1.343723

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：5322 / 5326

页数：5

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