ANALYSIS OF THE CANTILEVERED PLATE METHOD OF THIN-FILM INTRINSIC STRESS DETERMINATION

被引：7

作者：

LAUGIER, M

机构：

来源：

THIN SOLID FILMS | 1980年 / 66卷 / 02期

关键词：

D O I：

10.1016/0040-6090(80)90229-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：L7 / L10

页数：4

共 12 条

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