EFFECT OF SUPERLATTICE LAYER ELASTIC-MODULI ON HARDNESS

被引：110

作者：

SHINN, M

BARNETT, SA

机构：

[1] Department of Materials Science, Northwestern University, Evanston

来源：

APPLIED PHYSICS LETTERS | 1994年 / 64卷 / 01期

关键词：

D O I：

10.1063/1.110922

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Epitaxial V0.6Nb0.4N/NbN superlattices have been deposited on MgO(100) by reactive magnetron sputtering. The V0.6Nb0.4N alloy was chosen for one layer, rather than VN, in order to reduce the lattice mismatch from 5.7% to 3.5%, allowing growth of superlattices with relatively planar layers. The elastic moduli of NbN and V0.6Nb0.4N are nearly equal, in contrast to previously studied high-hardness nitride superlattices where the layer moduli differed substantially. Vickers microhardness measurements showed no measurable deviation (<4 GPa) from alloy values. The results verify that the difference in layer elastic moduli is the primary parameter determining nitride superlattice hardening.

引用

页码：61 / 63

页数：3

共 19 条

[1]

BARNETT SA, 1993, PHYSICS THIN FILMS, pCH1

[2]

CAHN JW, 1963, ACTA METALL, V11, P1274

[3] NANOINDENTATION STUDY OF THE MECHANICAL-PROPERTIES OF COPPER-NICKEL MULTILAYERED THIN-FILMS [J].