A HIGH-VOLTAGE POLYSILICON TFT WITH MULTIGATE STRUCTURES

被引:10
作者
UEMOTO, Y
FUJII, E
EMOTO, F
NAKAMURA, A
SENDA, K
机构
[1] Electronics Research Laboratory, Matsushita Electronics Corporation, Takatsuki
关键词
D O I
10.1109/16.65741
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We propose a new approach for obtaining a high-voltage thin-film transistor (TFT) with multigate structure where polysilicon TFT's are connected in series. A basic principle for high-voltage operations has been investigated in detail through calculations based on a model describing log IDS- VGS characteristics observed in a single-gate polysilicon TFT. It has been found that off-state (VGS < 0) operation of the polysilicon TFT causes large increase of breakdown voltage of the multigate TFT as a result that a nearly equal fraction of drain voltage is applied across the region around each elemental TFT. The breakdown voltage of drain of the fabricated multigate TFT which has five elemental TFT's has been elevated up to 80 V. © 1991 IEEE
引用
收藏
页码:95 / 100
页数:6
相关论文
共 16 条
[1]   HOT-ELECTRON EFFECTS IN SILICON-ON-INSULATOR N-CHANNEL MOSFET [J].
COLINGE, JP .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1987, 34 (10) :2173-2177
[2]   ANOMALOUS LEAKAGE CURRENT IN LPCVD POLYSILICON MOSFETS [J].
FOSSUM, JG ;
ORTIZCONDE, A ;
SHICHIJO, H ;
BANERJEE, SK .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1985, 32 (09) :1878-1884
[3]   ANOMALOUS SUBTHRESHOLD CURRENT VOLTAGE CHARACTERISTICS OF N-CHANNEL SOI MOSFETS [J].
FOSSUM, JG ;
SUNDARESAN, R ;
MATLOUBIAN, M .
IEEE ELECTRON DEVICE LETTERS, 1987, 8 (11) :544-546
[4]  
Hack M., 1988, International Electron Devices Meeting. Technical Digest (IEEE Cat. No.88CH2528-8), P252, DOI 10.1109/IEDM.1988.32804
[5]   NEW INTRA-GATE-OFFSET HIGH-VOLTAGE THIN-FILM TRANSISTOR WITH MISALIGNMENT IMMUNITY [J].
HUANG, TY ;
LEWIS, AG ;
WU, IW ;
CHIANG, A ;
BRUCE, RH .
ELECTRONICS LETTERS, 1989, 25 (08) :544-545
[6]  
KAWAMURA S, 1988 P INT S POW SEM, P127
[7]   CHARACTERISTICS AND 3-DIMENSIONAL INTEGRATION OF MOSFETS IN SMALL-GRAIN LPCVD POLYCRYSTALLINE SILICON [J].
MALHI, SDS ;
SHICHIJO, H ;
BANERJEE, SK ;
SUNDARESAN, R ;
ELAHY, M ;
POLLACK, GP ;
RICHARDSON, WF ;
SHAH, AH ;
HITE, LR ;
WOMACK, RH ;
CHATTERJEE, PK ;
LAM, HW .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1985, 32 (02) :258-281
[8]  
Morozumi S., 1983, SID 83, P156
[9]   CHARACTERIZATION OF POLYCRYSTALLINE SILICON MOS-TRANSISTORS AND ITS FILM PROPERTIES .1. [J].
ONGA, S ;
MIZUTANI, Y ;
TANIGUCHI, K ;
KASHIWAGI, M ;
SHIBATA, K ;
KOHYAMA, S .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1982, 21 (10) :1472-1478
[10]   DEVELOPMENT AND ELECTRICAL-PROPERTIES OF UNDOPED POLYCRYSTALLINE SILICON THIN-FILM TRANSISTORS [J].
PROANO, RE ;
MISAGE, RS ;
AST, DG .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1989, 36 (09) :1915-1922