OBSERVATION OF INTERFACIAL ATOMIC STEPS DURING SILICON OXIDATION

被引：69

作者：

GIBSON, JM

LANZEROTTI, MY

机构：

来源：

关键词：

D O I：

10.1038/340128a0

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

引用

页码：128 / 131

页数：4

共 23 条

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