RADIAL CURRENT DISTRIBUTION AT A PLANAR MAGNETRON CATHODE

被引：99

作者：

WENDT, AE ^{[1
]}

LIEBERMAN, MA ^{[1
]}

MEUTH, H ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,ELECTR RES LAB,BERKELEY,CA 94720

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期

关键词：

D O I：

10.1116/1.575263

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1827 / 1831

页数：5

共 8 条

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[3] INDUCED DRIFT CURRENTS IN CIRCULAR PLANAR MAGNETRONS [J].

ROSSNAGEL, SM ;

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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (01) :88-91

[4] LANGMUIR PROBE CHARACTERIZATION OF MAGNETRON OPERATION [J].

ROSSNAGEL, SM ;

KAUFMAN, HR .

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Schmidt G., 1979, PHYS HIGH TEMPERATUR, P29

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