EFFECT OF KILOVOLT ELECTRONS ON ETCH RATE OF AL2O3 AND TA2O5

[1] SIMPLE DEVICE FOR MEASURING BEAM CURRENT IN A SCANNING ELECTRON MICROSCOPE [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1968, 39 (09) : 1369 - &

[2] HOWARD JA, 1968, THESIS AIR FORCE I T

[3] FABRICATION OF PLANAR SILICON TRANSISTORS WITHOUT PHOTORESIST [J]. SOLID-STATE ELECTRONICS, 1968, 11 (02) : 261 - &

[4] PRINGLE J, PRIVATE COMMUNICATIO

[5] 211 SILV PRINT

[1] SIMPLE DEVICE FOR MEASURING BEAM CURRENT IN A SCANNING ELECTRON MICROSCOPE [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1968, 39 (09) : 1369 - &

[2] HOWARD JA, 1968, THESIS AIR FORCE I T

[3] FABRICATION OF PLANAR SILICON TRANSISTORS WITHOUT PHOTORESIST [J]. SOLID-STATE ELECTRONICS, 1968, 11 (02) : 261 - &

[4] PRINGLE J, PRIVATE COMMUNICATIO

[5] 211 SILV PRINT