ION-BEAM-INDUCED MIGRATION AND ITS EFFECT ON CONCENTRATION PROFILES

[1] Alefeld G, 1975, DIFFUSION SOLIDS REC, P231

[2] DEPTH RESOLUTION OF SPUTTER PROFILING [J]. APPLIED PHYSICS, 1979, 18 (02): : 131 - 140

[3] SPECIAL ASPECTS OF DIFFUSION IN THIN-FILMS [J]. THIN SOLID FILMS, 1975, 25 (02) : 363 - 392

[4] RECOIL CONTRIBUTION TO ION-IMPLANTATION ENERGY-DEPOSITION DISTRIBUTIONS [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (08) : 3385 - 3394

[5] BRICE DK, COMMUNICATION

[6] BRICE DK, 1975, ION IMPLANTATION RAN, V1

[7] CORBETT JW, 1966, SOLID STATE PHYSI S7, P271

[8] LOW-TEMPERATURE NEUTRON RADIATION DAMAGE AND RECOVERY IN BERYLLIUM [J]. PHYSICA STATUS SOLIDI, 1968, 29 (02): : 819 - +

[9] RADIATION ENHANCED DIFFUSION IN SOLIDS [J]. JOURNAL OF APPLIED PHYSICS, 1958, 29 (12) : 1713 - 1721

[10] ION-BEAM-INDUCED ATOMIC MIXING [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) : 3383 - 3386

[1] Alefeld G, 1975, DIFFUSION SOLIDS REC, P231

[2] DEPTH RESOLUTION OF SPUTTER PROFILING [J]. APPLIED PHYSICS, 1979, 18 (02): : 131 - 140

[3] SPECIAL ASPECTS OF DIFFUSION IN THIN-FILMS [J]. THIN SOLID FILMS, 1975, 25 (02) : 363 - 392

[4] RECOIL CONTRIBUTION TO ION-IMPLANTATION ENERGY-DEPOSITION DISTRIBUTIONS [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (08) : 3385 - 3394

[5] BRICE DK, COMMUNICATION

[6] BRICE DK, 1975, ION IMPLANTATION RAN, V1

[7] CORBETT JW, 1966, SOLID STATE PHYSI S7, P271

[8] LOW-TEMPERATURE NEUTRON RADIATION DAMAGE AND RECOVERY IN BERYLLIUM [J]. PHYSICA STATUS SOLIDI, 1968, 29 (02): : 819 - +

[9] RADIATION ENHANCED DIFFUSION IN SOLIDS [J]. JOURNAL OF APPLIED PHYSICS, 1958, 29 (12) : 1713 - 1721

[10] ION-BEAM-INDUCED ATOMIC MIXING [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) : 3383 - 3386